Tetrakis(dimethylamido)titanium (TDMAT)
Grade: 6N
Packaging Specifications:1.3L cylinder, 2.2L cylinder
Detailed Introduction
Product Introduction Page: Main Applications: Film formation processes in semiconductor wafer fabrication
TDMAT is an important organometallic precursor used in advanced semiconductor processes, mainly in atomic layer deposition and chemical vapor deposition of high-k dielectric materials and metallic titanium thin films.
