High-Purity Chlorine Trifluoride (ClF3)
Grade: 3N5
Packaging Specifications: 47L cylinder
Detailed Introduction
Main Applications: Cleaning processes in semiconductor wafer fabrication
High-purity chlorine trifluoride is a highly reactive, strongly corrosive fluorinating agent, mainly used in semiconductor manufacturing for high-temperature etching, chamber cleaning, and removal of special materials. Chlorine trifluoride is widely used in difficult etching and cleaning applications This product features advantages such as ultra-high purity and can meet various customer packaging requirements.
