Hexachlorodisilane (HCDS)
Grade: 7N
Packaging Specifications:38L cylinder
Detailed Introduction
Product Introduction Page: Main Applications: Film formation processes in semiconductor wafer fabrication
HCDS is an important silicon source precursor in semiconductor manufacturing. Its unique disilicon structure shows key advantages in advanced processes. It is mainly used for high-k dielectric material deposition and special thin film preparation, and is widely used in advanced logic chips and 3D NAND. This product features advantages such as ultra-high purity and can meet various customer requirements for packaging and cylinder connections.
