High-Purity Hexafluoroethane (C2F6)
Grade: 5N
Packaging Specifications:47L cylinder, 440L (Y-cylinder), 880L (SY-cylinder)
Detailed Introduction
Product Introduction Page: Main Applications: Etching processes in semiconductor wafer fabrication
As a high-performance fluorine-containing electronic gas, high-purity hexafluoroethane is mainly used in high-precision dry etching and chamber cleaning processes in semiconductor manufacturing. Its unique molecular structure shows key advantages in advanced processes. This product features advantages such as ultra-high purity and can meet various customer requirements for packaging and cylinder connections.
