High-Purity Trifluoromethane (CHF3)
Grade: 5N
Packaging Specifications:47L cylinder
Detailed Introduction
Product Introduction Page: Main Applications: Etching processes in semiconductor wafer fabrication
As an important fluorine-containing electronic specialty gas, high-purity trifluoromethane plays a key role in semiconductor processes, especially having irreplaceable advantages in the fields of dry etching and chamber cleaning in advanced processes. This product features advantages such as ultra-high purity and can meet various customer requirements for packaging and cylinder connections.
