High-Purity Hexafluorobutadiene (C4F6)
Grade: 4N
Packaging Specifications: 47L cylinder
Detailed Introduction
Main Applications: Etching processes in semiconductor wafer fabrication
High-purity hexafluorobutadiene is a novel fluorine-containing electronic gas, mainly used in high-precision etching and cleaning processes in semiconductor manufacturing, and exhibits excellent performance, especially in 3D NAND and advanced processes. This product features advantages such as ultra-high purity and can meet various customer requirements for packaging and cylinder connections.
